TEMPERATURE EFFECT COMPENSATION IN AVIATION PIEZORESISTIVE PRESSURE SENSORS
Keywords:
Piezoresistive pressure sensor, microelectromechanical sensor, polynomial model, cubic splines, automated calibration system
Abstract
Currently, piezoresistive pressure sensors (PDS) find expanded applications in various microelectronic
devices used in aviation technology. The behavior of the electrical signal of such
PDS mainly depends on the ambient temperature. It is known that the temperature drift of the PDS
output signal is influenced by various factors: the temperature effect, the dependence of the resistance
of the sensitive element on the concentration of impurities, the dependence of the Young's
modulus of the sensor membrane and substrate materials on temperature, etc. It was found that the
previously developed analytical calibration model of the sensor output signal, which takes into
account the models describing individual temperature effects, does not allow the pressure to be
measured with the required accuracy in the temperature range characteristic of aviation equipment
from –60 C to 140 C. Therefore, conventional polynomial mathematical models are used to
describe the dependence of the PDS output signal on the measured pressure and temperature.
The work uses a traditional approach, when the dependence of the output voltage on pressure is represented using a polynomial of relatively low order, and the dependences of the coefficients of
this polynomial on temperature are also specified by the corresponding polynomials. Unfortunately,
the temperature dependences of the coefficients are adequately described only by high-order
polynomials (at least 7), which complicates the model identification procedure and leads to computation
errors. Therefore, the authors proposed to look for the dependence of the coefficients on
temperature in the form of cubic splines. The paper describes in detail the identification technique
of the polynomial model under consideration and obtains expressions for correcting the PDS readings
when measuring pressure in wide temperature ranges. In order to experimentally confirm the
efficiency of the proposed method, an intelligent industrial automated system for the calibration of
traffic rules, described in the work, was used. It is shown how it can be used to take experimental
data to calibrate the sensor readings over a wide temperature range, and the procedure for identifying
the mathematical model of the pressure sensor required to minimize the cost of its certification
is described. The results of experimental studies of specific pressure sensors used in aviation
technology are presented.
References
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management, processing and transmission of information: Proceedings of the IV International
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3. Aljancic U., Resnik D., Vrtacnik D., Mozek M., Amon S. Temperature effects modeling in silicon
piezoresistive pressure sensor, Proc. of the 11-th Mediterranean Electrotechnical Conf.,
MELECON. Cairo, Egypt: IEEE, 2002, pp. 36-40.
4. Itskovich E.L. Sovremennye intellektual'nye datchiki obshchepromyshlennogo naznacheniya,
ih osobennosti i dostoinstva [Modern intelligent sensors for general industrial purposes, their
features and advantages], Datchiki i sistemy [Sensors and Systems], 2002, No. 2, pp. 42-47.
5. Mohamed R.L., Abdelhafid C. Influence of temperature on the offset voltage of piezoresistive
pressure sensors, Int. Conf. on Computational Methods in Science and Engineering. Corfu,
GREECE: AIP, 2007, pp. 25-30.
6. Chiou J.A., Chen S. Pressure nonlinearity of micromachined piezoresistive pressure sensors
with thin diaphragms under high residual stresses, Sensors and Actuators: Ser. A – Physical,
2008, No. 147 (1), pp. 332-339.
7. Frantlović M., Jokić I., Lazio Ž., Vukelić B., Obradov M., Vasiljević-Radović D. Temperature
measurement using silicon piezoresistive MEMS pressure sensors, Proc. of the 29th Int. Conf.
on Microelectronics MIEL. Belgrade, Serbia: IEEE, 2014, pp. 159-161.
8. Pershenkov P.P., Tyurin E.A., Bashkirov O.V. Intellektual'nye datchiki v sisteme izmereniya
davleniya [Intelligent sensors in the pressure measurement system], Nadezhnost' i kachestvo:
Sb. tr. Mezhdunar. simp. [Reliability and quality: Proceedings of the International
Symposium]: in 2 vol. Vol. 1. Penza: PGU, 2009, pp. 451-452.
9. Fraga M.A., Koberstein L.L. An Overview on the Modeling of Silicon Piezoresistive Pressure
Microsensors, 2012 Workshop on Engineering Applications (WEA). Bogota, Columbia, 2012.
DOI: 10.1109/WEA.2012.6220091.
10. L'vov A.A., Konovalov R.S. Vysokotemperaturnye datchiki davleniya [High temperature pressure
sensors], Nadezhnost' i kachestvo: Tr. Mezhdunar. simp. [Reliability and quality: Proceedings
of the International Symposium]: in 2 vol. Vol. 2. Penza, PGU, 2014, pp. 48-50.
11. Konovalov R.S., L'vov P.A., L'vov A.A. Povyshenie tochnosti p'ezorezistivnyh datchikov
davleniya [Accuracy improvement of piezoresistive pressure sensors], Problemy upravleniya,
obrabotki i peredachi informatsii: Sb. tr. IV Mezhdunar. nauch. konf. [Problems of management,
processing and transmission of information: Proceedings of the IV International Scientific
Conference]: in 2 v . V . 2. Sarat v: Izdat. d m «Rayt-Eksp », 2015, pp. 149-158.
12. L'vov A.A., Konovalov R.S. Malogabaritnye datchiki davleniya na osnove kremnievyh
polikristalichesikih struktur s dielektricheskoy izolyatsiey [Small-sized pressure sensors based
on silicon polycrystalline structures with dielectric isolation], Datchiki i sistemy [Sensors and Systems],
2015, No. 8 (195), pp. 29-32.
13. Nie M., Gao Y. The analytical calibration model of temperature effects on a silicon piezoresistive
pressure sensor, AIP Advances, 2017, No. 7, pp. 111-117.
14. L'vov A.A., L'vov P.A., Svetlov M.S., Kuzin S.A. Raspredelennaya sistema datchikov dlya avioniki,
upravlyaemaya po besprovodnomu radiokanalu [Distributed wirelessly controlled sensor system for
avionics], Nadezhnost' i kachestvo: Sb. tr. Mezhdunar. simp. [Reliability and quality: Proceedings of
the International Symposium]: in 2 vol. Vol. 1. Penza: PGU, 2017, pp. 100-103.
15. Drobynin M.E., L'vov P.A., L'vov A.A., Toropova O.A. Kompensatsiya temperaturnoy pogreshnosti
p'ezorezistivnyh datchikov davleniya s pomoshch'yu polumostovoy skhemy: analiz
metoda [Temperature error compensation of piezoresistive pressure sensors using a half-bridge
circuit: analysis of the method], Nadezhnost' i kachestvo: Sb. tr. Mezhdunar. simp. [Reliability
and quality: Proceedings of the International Symposium]: in 2 vol. Vol. 2. Penza: PGU, 2018,
pp. 85-88.
16. Drobynin M.E., L'vov P.A., L'vov A.A., Toropova O.A. Kompensatsiya temperaturnoy
pogreshnosti p'ezorezistivnyh datchikov davleniya s pomoshch'yu polumostovoy skhemy:
rezul'taty eksperimenta [Temperature error compensation of piezoresistive pressure sensors using
a half-bridge circuit: experimental results] Nadezhnost' i kachestvo: Sb. tr. Mezhdunar.
simp. [Reliability and quality: Proceedings of the International Symposium]: in 2 vol. Vol. 2.
Penza: PGU, 2018, pp. 409-413.
17. Tan Y.Y., Hong Y.U., Huang Q.A., Liu T.Q. Effect of temperature on the Young’s m du us f
silicon nano-films, Chinese J. of Electron Devices, 2007, No. 30 (3), pp. 755-758.
18. Scripal E.N., Ermakov R,V., Gutcevitch D.E., L’vov A.A., Sytnik A.A. Test Methods and Results
of the MEMS Inertial Sensors, Proc. 2018 IEEE Russia Section Young Researchers in
Electrical and Electronic Engineering Conf. St. Petersburg, Russia, 2018, pp. 1000-1003.
19. Doelle M.B. Temperature Extraction from a Pressure Sensor. US Patent No. 8,082,796 B1.
Silicon Microstructures Inc., USA, 2011.
20. Akbar M., Shanblatt M.A. Temperature Compensation of Piezoresistive Pressure Sensors, Sensors
and Actuators, 1992, Vol. 33, No. 3, pp. 155-162.
21. Peng K.H., Uang C.M. The Temperature Compensation of the Silicon Piezo-Resistive Pressure
Sensor Using the Half-Bridge Technique, Proc. of SPIE, 2004, Vol. 5343, pp. 292-301.
22. Konovalov R.S., L'vov P.A., L'vov A.A., Kuzin S.A. P'ezorezonansnyy datchik davleniya
povyshennoy tochnosti [Problems of control, information processing and transmission], Problemy
upravleniya, obrabotki i peredachi informatsii: Sb. tr. IV Mezhdunar. nauch. konf. [Problems
of management, processing and transmission of information: Proceedings of the IV International
Scientific Conference]: in 2 v . V . 2. Sarat v: Izdat. d m «Rayt-Eksp », 2015,
pp. 142-149.
23. Gridchin V.A., Konovalov R.S., L’vov A.A., Afanasiev M.Y., Danilova O.G. A Piezoresistive
Pressure Sensor Based on Polysilicon Thin Films with Dielectric Insulation, Problemy
upravleniya, obrabotki i peredachi informatsii: Sb. tr. IV Mezhdunar. nauch. konf. [Problems of
management, processing and transmission of information: Proceedings of the IV International
Scientific Conference]: in 2 v . V . 2. Sarat v: Izdat. d m «Rayt-Eksp », 2015, pp. 191-199.
24. Kay A., Ivanov M., Schaffer V. A Practical Technique for Minimizing the Number of Measurements
in Sensor Signal Conditioning Calibration, Texas Instruments. Application Rep.
SBOA111. Dallas: Texas Instruments, 2005, 9 p.
25. Konovalov R.S., L'vov P.A., L'vov A.A., Kuzin S.A., Bulykin D.A. Apparatnoe i algoritmicheskoe
obespechenie intellektual'nogo p'ezorezonansnogo datchika davleniya [Hardware and algorithmic
support of an intelligent piezoresonance pressure sensor], Problemy upravleniya, obrabotki i
peredachi informatsii: Sb. tr. IV Mezhdunar. nauch. konf. [Problems of control, information processing
and transmission: Proceedings of the IV International Scientific Conference]: in 2 vol.
V . 2. Sarat v: Izdate 'skiy d m «Rayt-Eksp », 2015, pp. 158-164.
26. Nikolaenko A.Yu., L'vov A.A., L'vov P.A., Konovalov R.S., Haustov V.V. Metodika
kompensatsii temperaturnoy pogreshnosti intellektual'nyh datchikov davleniya [Technique for
compensating temperature error of smart pressure sensors], Vestnik Saratovskogo
gosudarstvennogo tekhnicheskogo universiteta [Bulletin of the Saratov State Technical University],
2014, No. 4 (77), pp. 154-160.
27. Nikolaenko A.Yu., L'vov A.A., L'vov P.A. Kompensatsiya temperaturnoy pogreshnosti
intellektual'nyh datchikov davleniya [Temperature Compensation for Smart Pressure Sensors],
Nadezhnost' i kachestvo: Sb. tr. Mezhdunar. simp. [Reliability and quality: Proceedings of the
International Symposium]: in 2 vol. Vol. 2. Penza: PGU, 2014, pp. 57-59.
28. Drobynin M.E., YAsyuk N.A., L'vov P.A., Ivzhenko S.P. Issledovanie mikroelektromekhanicheskih
kremnievyh intellektual'nyh datchikov davleniya [Investigation of microelectromechanical silicon
intelligent pressure sensors], Problemy upravleniya, obrabotki i peredachi informatsii: Sb. tr.
VI Mezhdunar. nauch. konf. [Problems of management, processing and transmission of information:
Proceedings of the VI International Scientific Conference]. Saratov: OOO SOP
"Lodi", 2019, pp. 293-300.
29. Yasyuk N.A., Drobynin M.E., Shprekher M.I., Svetlova E.M., Ivzhenko S.P., L'vov P.A.
Issledovanie vliyaniya temperaturnyh effektov na rabotu p'ezorezistivnogo datchika davleniya
[Investigation of the effect of temperature effects on the operation of a piezoresistive pressure
sensor], Sistemnyy sintez i prikladnaya sinergetika: Sb. tr. IX Vseros. nauch. konf. [System
synthesis and Applied Synergetics: Proceedings of the IX All-Russian Scientific Conference].
Taganrog: Izd-vo YuFU, 2019, pp. 578-589.
30. Drobynin M.E., L'vov P.A., Ivzhenko S.P., Toropova O.A. Matematicheskaya model'
temperaturnyh effektov v kremnievom p'ezorezistivnom datchike davleniya [Mathematical
model of temperature effects in a silicon piezoresistive pressure sensor], Problemy
upravleniya, obrabotki i peredachi informatsii: Sb. tr. VI Mezhdunar. nauch. konf. [Problems
of management, processing and transmission of information: Proceedings of the VI International
Scientific Conference]. Saratov: OOO SOP "Lodi", 2019, pp. 384-390.
31. L’vov A., L’vov P., Konovalov R. Improvement of Piezoresistive Pressure Sensor Accuracy by
Means of Current Loop Circuit Using Optimal Digital Signal Processing, Proc. of the 2016
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Published
2021-12-24
Issue
Section
SECTION I. MODELING OF PROCESSES AND SYSTEMS
