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LOGIC CELL FOR VLSI BASED ON FIELD-EFFECT TRANSISTORS WITH P-N JUNCTIONS
P.G. Gritzaenko, L. А. Svetlichnaya97-1062025-08-01Abstract ▼In the 80s of the last century, integrated injection logic (I2L) was widely used as an element
base. Somewhat later, injection-field logic (IPL) appeared in the development of I2L capabilities
for building VLSI. Thanks to the use of a field-effect transistor as a key element of the inverter, in
this element basis it was possible to significantly reduce an important indicator for VLSI – power
consumption - reaching the peak-watt range. An even greater reduction in power consumption can
be achieved by using two field-effect transistors in the inverter unit cell, which is proposed in this
paper. This element basis is proposed to be called field-field logic, or in the future P2L. To reduce
the dimensions of the P2L cell, field-effect transistors, both key and load, are made with a vertical
channel. In addition, to ensure a positive supply voltage, an n-channel transistor is used as a key
one, and a p–channel transistor is used as a load one. Both transistors are normally closed, i.e.
closed at zero gate voltage. Topological variants of P2L-cell execution from geometry with annular
gates to geometry with linear gates proposed by the author earlier are considered. The topological
norms adopted in the consideration are the norms of 50 nm. The power consumption in this
element basis is reduced by about two times compared to the IPL, due to the fact that the current
flows through the load transistors in the inverter chain through one inverter, as well as through
the key ones. The technological process of manufacturing a P2L cell is considered, the profiles of
the distribution of impurities in depth are calculated. The manufacturing process is designed taking
into account the fact that the load p-channel transistor must be made in an insulated pocket
using full dielectric insulation technology. The technological modes of manufacturing the P2L cell
are given. The proposed design and technological variant of the P2L cell can be recommended for
the creation of VLSI with low power consumption








