КОМПЕНСАЦИЯ ВЛИЯНИЯ ТЕМПЕРАТУРЫ В АВИАЦИОННЫХ ПЬЕЗОРЕЗИСТИВНЫХ ДАТЧИКАХ ДАВЛЕНИЯ
Ключевые слова:
Пьезорезистивный датчик давления, микроэлектромеханический датчик, полиномиальная модель, кубические сплайны, автоматизированная система градуировки
Аннотация
В настоящее время пьезорезистивные датчики давления (ПДД) широко применяются
в различных микроэлектронных устройствах, используемых в авиационной технике. Пове-
дение электрического сигнала таких ПДД в основном зависит от температуры окружаю-
щей среды. Известно, что на температурный дрейф выходного сигнала ПДД влияют раз-
личные факторы: температурный эффект, зависимость сопротивления чувствительного
элемента от концентрации примесей, зависимость модуля Юнга мембраны датчика и под-
ложки от температуры и др. Установлено, что разработанная ранее аналитическая ка-
либровочная модель выходного сигнала ПДД, учитывающая отдельные температурные
эффекты, не позволяет измерять давление с требуемой точностью в диапазоне изменения
температур, характерном для авиационной техники, — от минус 60 до 140 С. Поэтому
для описания зависимости выходного сигнала ПДД от измеряемого давления и температу-
ры используются традиционные полиномиальные математические модели. В работе ис-
пользуется традиционный подход, когда зависимость выходного напряжения от давления
представляется с помощью полинома относительно невысокого порядка, а зависимости
коэффициентов этого полинома от температуры также задаются соответствующими
полиномами. К сожалению, температурные зависимости коэффициентов адекватно опи-
сываются только полиномами высокого порядка (не менее 7), что усложняет процедуру
идентификации модели и ведет к ошибкам вычислений. Поэтому авторы предложили ис-
кать зависимости коэффициентов от температуры в виде кубических сплайнов. В работе
подробно описана методика идентификации рассматриваемой полиномиальной модели и
получены выражения для корректировки показаний ПДД при измерениях давления в широ-
ких температурных пределах. С целью экспериментального подтверждения работоспо-
собности предложенного метода была использована интеллектуальная промышленная
автоматизированная система градуировки ПДД, описанная в работе. Показано, как с ее
помощью можно снимать экспериментальные данные для градуировки показаний датчика
в широких температурных пределах, и описана процедура идентификации математиче-
ской модели датчика давления, необходимой для минимизации затрат на его сертифика-
цию. Приведены результаты экспериментальных исследований конкретных ПДД, исполь-
зуемых в авиационной технике.
Литература
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2. Boukabache A., Pons R. Doping effects on thermal behaviour of silicon resistor, Electronics
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3. Aljancic U., Resnik D., Vrtacnik D., Mozek M., Amon S. Temperature effects modeling in silicon
piezoresistive pressure sensor, Proc. of the 11-th Mediterranean Electrotechnical Conf.,
MELECON. Cairo, Egypt: IEEE, 2002, pp. 36-40.
4. Itskovich E.L. Sovremennye intellektual'nye datchiki obshchepromyshlennogo naznacheniya,
ih osobennosti i dostoinstva [Modern intelligent sensors for general industrial purposes, their
features and advantages], Datchiki i sistemy [Sensors and Systems], 2002, No. 2, pp. 42-47.
5. Mohamed R.L., Abdelhafid C. Influence of temperature on the offset voltage of piezoresistive
pressure sensors, Int. Conf. on Computational Methods in Science and Engineering. Corfu,
GREECE: AIP, 2007, pp. 25-30.
6. Chiou J.A., Chen S. Pressure nonlinearity of micromachined piezoresistive pressure sensors
with thin diaphragms under high residual stresses, Sensors and Actuators: Ser. A – Physical,
2008, No. 147 (1), pp. 332-339.
7. Frantlović M., Jokić I., Lazio Ž., Vukelić B., Obradov M., Vasiljević-Radović D. Temperature
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davleniya [Intelligent sensors in the pressure measurement system], Nadezhnost' i kachestvo:
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Symposium]: in 2 vol. Vol. 1. Penza: PGU, 2009, pp. 451-452.
9. Fraga M.A., Koberstein L.L. An Overview on the Modeling of Silicon Piezoresistive Pressure
Microsensors, 2012 Workshop on Engineering Applications (WEA). Bogota, Columbia, 2012.
DOI: 10.1109/WEA.2012.6220091.
10. L'vov A.A., Konovalov R.S. Vysokotemperaturnye datchiki davleniya [High temperature pressure
sensors], Nadezhnost' i kachestvo: Tr. Mezhdunar. simp. [Reliability and quality: Proceedings
of the International Symposium]: in 2 vol. Vol. 2. Penza, PGU, 2014, pp. 48-50.
11. Konovalov R.S., L'vov P.A., L'vov A.A. Povyshenie tochnosti p'ezorezistivnyh datchikov
davleniya [Accuracy improvement of piezoresistive pressure sensors], Problemy upravleniya,
obrabotki i peredachi informatsii: Sb. tr. IV Mezhdunar. nauch. konf. [Problems of management,
processing and transmission of information: Proceedings of the IV International Scientific
Conference]: in 2 v . V . 2. Sarat v: Izdat. d m «Rayt-Eksp », 2015, pp. 149-158.
12. L'vov A.A., Konovalov R.S. Malogabaritnye datchiki davleniya na osnove kremnievyh
polikristalichesikih struktur s dielektricheskoy izolyatsiey [Small-sized pressure sensors based
on silicon polycrystalline structures with dielectric isolation], Datchiki i sistemy [Sensors and Systems],
2015, No. 8 (195), pp. 29-32.
13. Nie M., Gao Y. The analytical calibration model of temperature effects on a silicon piezoresistive
pressure sensor, AIP Advances, 2017, No. 7, pp. 111-117.
14. L'vov A.A., L'vov P.A., Svetlov M.S., Kuzin S.A. Raspredelennaya sistema datchikov dlya avioniki,
upravlyaemaya po besprovodnomu radiokanalu [Distributed wirelessly controlled sensor system for
avionics], Nadezhnost' i kachestvo: Sb. tr. Mezhdunar. simp. [Reliability and quality: Proceedings of
the International Symposium]: in 2 vol. Vol. 1. Penza: PGU, 2017, pp. 100-103.
15. Drobynin M.E., L'vov P.A., L'vov A.A., Toropova O.A. Kompensatsiya temperaturnoy pogreshnosti
p'ezorezistivnyh datchikov davleniya s pomoshch'yu polumostovoy skhemy: analiz
metoda [Temperature error compensation of piezoresistive pressure sensors using a half-bridge
circuit: analysis of the method], Nadezhnost' i kachestvo: Sb. tr. Mezhdunar. simp. [Reliability
and quality: Proceedings of the International Symposium]: in 2 vol. Vol. 2. Penza: PGU, 2018,
pp. 85-88.
16. Drobynin M.E., L'vov P.A., L'vov A.A., Toropova O.A. Kompensatsiya temperaturnoy
pogreshnosti p'ezorezistivnyh datchikov davleniya s pomoshch'yu polumostovoy skhemy:
rezul'taty eksperimenta [Temperature error compensation of piezoresistive pressure sensors using
a half-bridge circuit: experimental results] Nadezhnost' i kachestvo: Sb. tr. Mezhdunar.
simp. [Reliability and quality: Proceedings of the International Symposium]: in 2 vol. Vol. 2.
Penza: PGU, 2018, pp. 409-413.
17. Tan Y.Y., Hong Y.U., Huang Q.A., Liu T.Q. Effect of temperature on the Young’s m du us f
silicon nano-films, Chinese J. of Electron Devices, 2007, No. 30 (3), pp. 755-758.
18. Scripal E.N., Ermakov R,V., Gutcevitch D.E., L’vov A.A., Sytnik A.A. Test Methods and Results
of the MEMS Inertial Sensors, Proc. 2018 IEEE Russia Section Young Researchers in
Electrical and Electronic Engineering Conf. St. Petersburg, Russia, 2018, pp. 1000-1003.
19. Doelle M.B. Temperature Extraction from a Pressure Sensor. US Patent No. 8,082,796 B1.
Silicon Microstructures Inc., USA, 2011.
20. Akbar M., Shanblatt M.A. Temperature Compensation of Piezoresistive Pressure Sensors, Sensors
and Actuators, 1992, Vol. 33, No. 3, pp. 155-162.
21. Peng K.H., Uang C.M. The Temperature Compensation of the Silicon Piezo-Resistive Pressure
Sensor Using the Half-Bridge Technique, Proc. of SPIE, 2004, Vol. 5343, pp. 292-301.
22. Konovalov R.S., L'vov P.A., L'vov A.A., Kuzin S.A. P'ezorezonansnyy datchik davleniya
povyshennoy tochnosti [Problems of control, information processing and transmission], Problemy
upravleniya, obrabotki i peredachi informatsii: Sb. tr. IV Mezhdunar. nauch. konf. [Problems
of management, processing and transmission of information: Proceedings of the IV International
Scientific Conference]: in 2 v . V . 2. Sarat v: Izdat. d m «Rayt-Eksp », 2015,
pp. 142-149.
23. Gridchin V.A., Konovalov R.S., L’vov A.A., Afanasiev M.Y., Danilova O.G. A Piezoresistive
Pressure Sensor Based on Polysilicon Thin Films with Dielectric Insulation, Problemy
upravleniya, obrabotki i peredachi informatsii: Sb. tr. IV Mezhdunar. nauch. konf. [Problems of
management, processing and transmission of information: Proceedings of the IV International
Scientific Conference]: in 2 v . V . 2. Sarat v: Izdat. d m «Rayt-Eksp », 2015, pp. 191-199.
24. Kay A., Ivanov M., Schaffer V. A Practical Technique for Minimizing the Number of Measurements
in Sensor Signal Conditioning Calibration, Texas Instruments. Application Rep.
SBOA111. Dallas: Texas Instruments, 2005, 9 p.
25. Konovalov R.S., L'vov P.A., L'vov A.A., Kuzin S.A., Bulykin D.A. Apparatnoe i algoritmicheskoe
obespechenie intellektual'nogo p'ezorezonansnogo datchika davleniya [Hardware and algorithmic
support of an intelligent piezoresonance pressure sensor], Problemy upravleniya, obrabotki i
peredachi informatsii: Sb. tr. IV Mezhdunar. nauch. konf. [Problems of control, information processing
and transmission: Proceedings of the IV International Scientific Conference]: in 2 vol.
V . 2. Sarat v: Izdate 'skiy d m «Rayt-Eksp », 2015, pp. 158-164.
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