Article

Article title MIKRO — AND NANOMEHANICHESKY MIRRORS FOR LABORATORIES-ON-CRYSTALS
Authors I.E. Lysenko, A.M. Rossikhin
Section SECTION V. BRIEF REPORTS
Month, Year 10, 2009 @en
Index UDC 621.3.049.77
DOI
Abstract The integrated design of a micromechanical mirror with elektrostati-cheskoj activation is described. The mathematical model elastic подвеса a mirror element is developed.

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Keywords Design; microoptoelectromehanichesky systems; mirrors; laboratories-on-crystals.
References

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